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Thermodynamic Behavior of SiH2Cl2 in Polysilicon Production by Siemens Process

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Abstract:

The present of SiH2Cl2 (DCS) is a big problem because of its instability. The content of SiH2Cl2 should be controlled below somewhat concentration. Therefore, the present study is aimed at investigating the thermodynamic behavior of SiH2Cl2 in polysilicon production by Siemens process in order to provide effective theory for the production process. The effect of pressure (1-5atm), feeding ratio of H2 to SiHCl3 (2-50) and temperature (1000-1500K) have been studied in the paper. The results show that the productivity ratio of DCS increases with increasing pressure and increases firstly and then decreases with increasing feeding ratio or temperature. In a word, the pressure have biggest effect on productivity ratio of DCS compared to temperature and feeding ratio.

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Periodical:

Advanced Materials Research (Volumes 712-715)

Pages:

325-328

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.712-715.325

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Online since:

June 2013

Authors:

Dong Ming Song, Yan Qing Hou, Gang Xie, Zhuo Huang Ma

Keywords:

DCS, Polysilion, Siemens Process, Thermodynamic

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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References

[1] Y. Hou, G. Xie, D. Tao et. al. : Material Review, 24(2010), pp.31-34.

Google Scholar

[2] H. Shen and Z. Q. Zeng: Photovoltaic Technology Applied to Utilize Solar Energy (Academic Press, Beijing 2005), in Chinese.

Google Scholar

[3] Y. Hou, G. Xie, D. Tao et. al. : Journal of Chemical Engineering of Japan, 44(2011), pp.382-388.

Google Scholar

[4] Y. Hou, G. Xie, D. Tao et. al. : Journal of Chemical Engineering of Japan, 44(2011), pp.214-223.

Google Scholar

[5] E. Sirtl, L. P. Hunt and D. H. Sawyer: J. Electrochem. Soc., 121(1974), pp.919-926.

Google Scholar

[6] L. P. Hunt, and E. J. Sirtl: Electrochem. Soc., 119(1972), pp.1741-1747.

Google Scholar

[7] R. J. Kee, F. M. Rupley and J. A. Miller: National Laboratories Report SAND, 87-8215B (1990), pp.1-87.

Google Scholar

[8] Y. Hou, G. Xie, P. A. Ramachandran, et. al. Thermodynamic Simulation of Modified Siemens Process, in submitting.

Google Scholar

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