A THz-Wave Generator Based on MEMS Technology

Ji Fang Tao; Wei Ming Zhu; Hong Cai; Jian Wu; Kun Xu; Jin Tong Lin; Ai Qun Liu

doi:10.4028/www.scientific.net/AMR.74.59

Paper Titles

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The Design and Fabrication of Poly(dimethylsiloxane) Single Mode Rib Waveguides for Lab-on-a-Chip Applications
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Analysis of Novel Building Blocks for Photonic MEMS Based on Deep 1D Photonic Crystals
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A THz-Wave Generator Based on MEMS Technology
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Flows in Microchannels and Cavities – Visco-Elasticity, Faradaic Charging and Surface Roughness Effects
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Mixing Enhancement of a Passive Micromixer by Applying Boundary Protrusion Structures
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 74A THz-Wave Generator Based on MEMS Technology

A THz-Wave Generator Based on MEMS Technology

Abstract:

This paper reports a new kind Terahertz generator using tunable dual-wavelength generator based on MEMS technology, which are developed based on free-carrier effect (FCE) and thermo-optic effect (TOE) [1-3]. The approach provides a wide tuning range from 0 to 15 nm by adjusting the current of laser diodes and heating up common silicon Fabry-Perot (FP) external cavity. Compared to the conventional optical generation methods, this method has fast tuning speed (<1 ms), small size (2.2 mm 0.8 mm), high integration and quite stability performance.