A THz-Wave Generator Based on MEMS Technology
This paper reports a new kind Terahertz generator using tunable dual-wavelength generator based on MEMS technology, which are developed based on free-carrier effect (FCE) and thermo-optic effect (TOE) [1-3]. The approach provides a wide tuning range from 0 to 15 nm by adjusting the current of laser diodes and heating up common silicon Fabry-Perot (FP) external cavity. Compared to the conventional optical generation methods, this method has fast tuning speed (<1 ms), small size (2.2 mm 0.8 mm), high integration and quite stability performance.
Selin Teo, A. Q. Liu, H. Li and B. Tarik
J. F. Tao et al., "A THz-Wave Generator Based on MEMS Technology", Advanced Materials Research, Vol. 74, pp. 59-62, 2009