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Effects of Mg-Doping on Resistance Switching Property of MgxZn1-xO Thin Films Prepared by Sol-Gel Method
Abstract:
The films of MgxZn1-xO were prepared on ITO-coated glass substrates by sol-gel method at low temperature. The influence of Mg content x on microstructure and resistive switching behavior in MgxZn1-xO films was systematically investigated. It was found that all MgxZn1-xO samples exhibit a polycrystalline character with a single phase hexagonal wurtzite structure, irrespective of the Mg content x. With the increase of Mg content x, the Vset, Vreset, RLRS and RHRS/RLRS of MgxZn1-xO films increased, but the endure of MgxZn1-xO films switching cycles decreased as the Mg content x is over 0.2 and exhibited a smaller degradation of resistance as the Mg content x is 0.1. The resistance switching mechanism was discussed.
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1034-1037
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August 2013
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© 2013 Trans Tech Publications Ltd. All Rights Reserved
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