Sensitive Layer Thickness Dependence on Microcantilever Sensor Sensitivity

Abstract:

A sensitive layer is a main component in detecting an analyte target in a microcantilever-based biosensor. The sensitive layer coated on the microcantilever surface can induce a surface stress change as consequence of adsorbate-surface interaction. Therefore, a presence of stress is necessary to be investigated because it determines a deflection which influences the sensor sensitivity. In this work, we study a dependence of the film stress and microcantilever deflection on the gold or 3-Aminopropyltriethoxysilane (aminosilane) layers thickness in static mode operation. It is found that the optimum thickness of the sensitive layer for both aminosilane and gold can be obtained by analyzing the maximum film stress and the maximum microcantilever deflection. We also investigated the effect of Youngs moduli on the maximum stress and the maximum deflection. It is obtained that the Youngs moduli is a function that determines the peaks on the maximum stress and the maximum deflection. Our results indicate that the material properties and the thickness of sensitive layer should be considered to obtain a high sensitivity of microcantilever biosensor.

• Periodical: Advanced Materials Research (Volume 789)
• Pages: 219-224
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.789.219
• Online since: September 2013
• Authors: Lia Aprilia, Ratno Nuryadi, Djoko Hartanto
• Keywords: Deflection, Microcantilever, Sensitive Layer, Stress, Thickness

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