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Preparation of Uniform SiO2 Films on Sapphire Dome by r.f. Magnetron Reactive Sputtering

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Abstract:

The convex surface of the infrared dome is exposed to the harsh environment of the outside world, and therefore requires a coating which not only increases transmission but is able to withstand rain erosion so as to enhance system performance. This paper deals with the techniques that were developed to deposit a uniform thick SiO2 coating for sapphire dome by radio frequency magnetron sputtering. Results show that average transmission increment in wavelength range from 3 to 5um for the sapphire dome coated on convex surface was more than 4.0%. The transmission non-uniformity over the convex surface of the coated sapphire dome was less than 1.7%.

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Periodical:

Advanced Materials Research (Volumes 79-82)

Pages:

679-682

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.79-82.679

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Online since:

August 2009

Authors:

Li Ping Feng, Zheng Tang Liu, Qi Jun Liu, Yang Ping Li

Keywords:

Dome, Magnetron Reactive Sputtering, Sapphire, SiO2 Film

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© 2009 Trans Tech Publications Ltd. All Rights Reserved

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