For Libraries For Publication Open Access Downloads About Us Contact Us
Paper Titles
Characterization of Nanostructured ZnO Thin Films Deposited by Sol-Gel Spin Coating
p.703
The Biological Behavior of Endothelial Progenitor Cells on Titanium Surface Immobilized by CD34 Antibody
p.707
Preparation of WS2/MoS2/C Composite Films and their Tribological Properties
p.711
Design of Ultrasonic Vibrator for Conformal Coating Spray in LED Packaging
p.715
Crystal Orientation and Hardness of Au/NiCr/Ta Films on Si-(111) Substrate Prepared by Magnetron Sputtering
p.719
Biomimetic Artificial PVDF Film Reproduce the Superhydrophobic Property of a Lotus Leaf
p.723
Optimization of Hemocompatibility of Silicon Oxynitride Films
p.727
Electrochemical Behavior of Non-Equilibrium Coatings by Electric Arc Spraying
p.731
Corrosion-Wear Behavior of TiO2 Films in Hanks’ Solution
p.735

Crystal Orientation and Hardness of Au/NiCr/Ta Films on Si-(111) Substrate Prepared by Magnetron Sputtering

Article Preview

Abstract:

Au/NiCr/Ta soft multi-layered metal films were deposited on hard Si-(111) substrate by magnetron sputtering. The crystal orientation, Hardness (H) and Elastic modulus (E) were investigated as a function of substrate temperature by XRD and nanoindentation techniques. The XRD revealed that all films on Si-(111) substrate are Au-(111) preferred orientation, indicating there are no alloying phases in the films, which is different from Au/NiCr/Ta films on Al2O3 substrate with a mixture of Au-(111) and Au-(200) orientation. Nanoindentation tests at shallow indentation depths (h≤t/4) where the hardness is reliable for metal films on hard substrate. Au film at substrate temperature 200°C has the highest hardness 4.2GPa. Meanwhile, the H/E value also indicated that the Au/NiCr/Ta films have preferable wear resistance at substrate temperature 200°C.

You might also be interested in these eBooks
Multi-Functional Materials and Structures II View Preview

Info:

Periodical:

Advanced Materials Research (Volumes 79-82)

Pages:

719-722

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.79-82.719

Citation:

Cite this paper

Online since:

August 2009

Authors:

Wu Tang, Xue Song Yin, Long Jiang Deng, Jian Lu

Keywords:

Crystal Orientation, Hardness, Metal Film, Nanoindentation

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2009 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] J.A. Knapp, J.F. Browning and G.M. Bond: J. Appl. Phys. Vol. 105 (2009), p.053501.

Google Scholar

[2] H. C. Barshilia, B. Deepthi and K.S. Rajam: J. Appl. Phys. Vol. 104 (2008), p.113532.

Google Scholar

[3] A.P. Singh, D.D. Gandhi, B. Singh, E. Simonyi, E.G. Liniger, S.V. Nitta, M.W. Lane and G. Ramanath: Appl. Phys. Lett. Vol. 94, (2009), p.093502.

DOI: 10.1063/1.3081388

Google Scholar

[4] H.S. Chou, J.C. Huang, L.W. Chang and T.G. Nieh: Appl. Phys. Lett. Vol. 93, (2008), p.191901.

Google Scholar

[5] J.A. Knapp, J.F. Browning and G.M. Bond: J. Appl. Phys. Vol. 105 (2009), p.053501.

Google Scholar

[6] W.C. Oliver and G.M. Pharr: J. Mater. Res. Vol. 7 (1992), p.1564.

Google Scholar

[7] W. Tang, K. Xu, P. Wang and X. Li: Mater. Lett. Vol. 57 (2003), p.3101.

Google Scholar

[8] W.D. Nix and H. Gao: J. Mech. Phys. Solids. Vol. 46 (1998), p.411.

Google Scholar

[9] R. Saha et al: J. Mech. Phys. Solids. Vol. 49 (2001), p. (1997).

Google Scholar

[10] H. Sjostrom, M.B.S. Strafstrom and J.E. Sundgren: Phys. Rev. Lett. Vol. 75 (1995), p.1336.

Google Scholar

[11] H.Q. Lou, N. Axen, R.E. Somekh and I.M. Hutchings: Diamond Relat. Mater. Vol. 5 (1996), p.1303.

Google Scholar

© 2025 Trans Tech Publications Ltd. All rights are reserved, including those for text and data mining, AI training, and similar technologies. For open access content, terms of the Creative Commons licensing CC-BY are applied.
Scientific.Net is a registered trademark of Trans Tech Publications Ltd.