Influence of Platinum on Electrical Propertires of Silicon Schottky Diode

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The purpose of the paper is present the new result of electrical properties of Pt-doped silicon Schottky diodes that are fabricated by using CMOS technology. The results show the comparison of electrical properties namely current-voltage and capacitance characteristics between undoped and Pt-doped Schottky diode. The current characteristics of Pt-doped diode are decreased about 2 to 3 orders in term of reverse bias. As well as in case of forward bias, the current is slightly decreased. Schottky barrier height after Pt doping was increased from 0.84 eV to 0.86 eV. The built-in voltage of Pt-doped diodes was increased from 0.38 V to 0.42 V. The C-V characteristics after Pt doping is decreased about 5 pF. The change of electrical properties are caused by Pt because Pt atoms in silicon can occupy interstitial sites and change the trapping center. This paper will study and analyze the effect of Pt atom in silicon bulk of Schottky diode.

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192-195

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September 2013

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© 2013 Trans Tech Publications Ltd. All Rights Reserved

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[1] X.Y. Liang, J.H. Min, J. Chen, D. Wang, H. Li, Y. Wang, L.J. Wang and J. J Zhang: Phys. Procedia, Vol. 32 (2012), pp.545-550.

Google Scholar

[2] Shing-Dar Wang, Sanboh Lee and Chun-Hway Hsueh: Mech. Mater, Vol. 33 (2001), pp.105-120.

Google Scholar

[3] M.A. Yeganeh and R.K. Mamedov: Superlattices Microstruct., Vol. 51 (2012), pp.792-798.

Google Scholar

[4] J. Vobecky and P. Hazdra: submitted to Nuclear Instruments and Methods in Physics Research B 253 (2006), p.162–166.

Google Scholar

[5] J. Prabket, I. Srithanachai, S. Ueamanapong, A. Poyai and S. Niemcharoen: Avd. Mater. Res., Vol. 378-379 (2012), pp.6060-609.

DOI: 10.4028/www.scientific.net/amr.378-379.606

Google Scholar

[6] J. Prabket, I. Srithanachai, S. Ueamanapong, A. Poyai, W. Titiroongruang, S. Niemcharoen, and P. P. Yupapin: submitted to Scientific Research and Essays, Vol. 7(11) (2012), pp.1230-1236.

Google Scholar

[7] A. Poyai, in: Defects assessment in advanced semiconductor materials and devices, Ph. D Thesis (2002), Katholieke Universiteit Leuven, Belgium.

Google Scholar

[8] Z. Wang, M. Zhu, X. Chen, Q. Yan and J. Zhang: Microeletron. Eng., Vol. 103 (2013), pp.36-41.

Google Scholar

[9] S.M. Sze, in: Physics of Semiconductor Devices , John Wiley & Sons (1981), New York.

Google Scholar

[10] I. Srithanachai, S. Ueamanapong, P. Rujunapich, N. Atiwongsangthong, S. Niemcharoen, A. Poyai and W. Titiroongruang: Mater. Sci. Forum., Vol. 695 (2011), pp.569-572.

DOI: 10.4028/www.scientific.net/msf.695.569

Google Scholar

[11] I. Srithanachai and S. Niemcharoen: Adv. Sci. Lett., Vol. 19 (2013), pp.670-673(4).

Google Scholar

[12] S. Ueamanapong, I. Srithanachai, N. Atiwongsangthong, N. Klunngien, A. Poyai and S. Niencharoen: Adv. Sci. Lett., Vol. 19 (2013), pp.997-1000(4).

DOI: 10.1166/asl.2013.4800

Google Scholar