Membrane Displacement Behavior of Capacitive Micromachined Ultrasonic Transducers under Static Bias

Abstract:

The present paper focuses on the theory of vibration of a circular micro-machined ultrasonic transducer to model a single cell of Capacitive Micromachined Ultrasonic Transducers (CMUTs) and it describes the displacement behavior of membrane with respect to applied static bias following Masons analysis of a suspended membrane under tension. Analysis of the critical parameters like collapse voltage and membrane deflection is made and compared with experimental results to verify the validity of the model.

• Periodical: Advanced Materials Research (Volumes 816-817)
• Pages: 892-896
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.816-817.892
• Online since: September 2013
• Authors: Reshmi Maity, R.K. Thapa, S. Baishya
• Keywords: CMUT, Collapse Voltage, Membrane Deflection, Stretched Circular Membrane

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