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Growth Environment of Carbon Nanotubes by DC-PCVD
Abstract:
The method of carbon nanotubes by DC-PCVD is analysed. Growth environment of carbon nanotubes is researched with the substrate temperature at 500°C-900°C.The pressure of gas is 60torr,75torr,90torr.It is appropriate when the temperature is 700°C and the pressure is 75torr.Growth characteristic of carbon nanotubes is researched when the concentration of CH4 ranges is 8%-20%.The diameter of carbon nanotubes is uniform when the concentration of CH4 is low.The diameter is not uniform if the concentration is high.
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170-173
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February 2014
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© 2014 Trans Tech Publications Ltd. All Rights Reserved
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