Grain Size Analysis on Ba0.65Sr0.35TiO3 Thin Films Using Design of Experiment

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This paper presents the relationship between spin coating speed, heat treatment time, and annealing temperature in response to the grain size in ferroelectric Barium Strontium Titanate (BST). Many fundamental issues such as heat conduction, contact deformation, mechanical stress, and friction can be explained and distinguished through the understanding of the grain size. The investigation was done using a full factorial design of experiment (DOE). Analysis was done quantitatively by plotting the main effects graphs. The results suggest that higher spin coating speed and the annealing temperature decreases the grain size while the heat treatment time is directly proportional to the value of grain size.

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211-214

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February 2014

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© 2014 Trans Tech Publications Ltd. All Rights Reserved

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