Advanced Materials Research Vol. 901

Abstract: In this paper, we investigated the photoluminescence property of ZnO films which were irradiated by KrFexcimer laser. Through the analysis of photoluminescence and UV-VIS spectra, it is shown that the red shift of band gap forthe irradiated sample. Room temperature UV photoluminescence of ZnO film is composed of contribution from the FX, the neutral donor bound exciton (D⁰X) emission and the longitudinal optical (LO) phonon replicas of the bound exciton transition (D⁰X-1LO). The visible emission band is ascribed toVO+, VZn-, Oiand Vo++. It shows that KrF laser irradiation could effectively modulate the exciton emission, which is important for the application of high performance of emitting optoelectronic devices.

Abstract: With the development of marine economy in our country, many islands are faced with the bottleneck of lack of fresh water. The purpose of this paper is to calculate the efficiency parameters by designing the multi-effect desalination device and procedure, which is based on the parameters from the single effect desalination experiment of the rising liquid film on the microscale fluted surface of horizontal tubes. Compared with the vertical tube falling film desalination in the same working condition, the desalination using the rising liquid film on the microscale fluted surface of horizontal tubes can reduce the initial evaporation pressure and steam temperature. This improvement will be more conducive to the application of marine equipment, and provide technical support to resolve the lagging problem of islands infrastructure. Nomenclature

Abstract: A novel air-hole assisted metaldielectricmetal (MDM) waveguide has been proposed and numerically demonstrated. It has excellent characters including subwavelength mode confinement, chip-scale long propagation length, highly efficient direct bends with compact footprints, and high waveguide isolation with tiny center-to-center separation at the wavelength of 1.55 μm. To prove that the hybrid waveguide could be an ideal candidate for large-scale photonic integration, its characters are all compared with the silicon, photonic crystal, surface plasmon polariton based waveguides.

Abstract: In engineering application, the nonlinearity effect of the environment noise is inconsistent with the successive starting state of MEMS gyroscope which will induce the random drifts. It manifests as the weak nonlinearity, non stability and slow time varying which cannot be compensated by the conventional method. In order to overcome the problems of the great random drift error model established based on the time series for MEMS gyroscope and the non Gaussian noise, the method of Iteration Unscented Kalman Particle Filter (IUKPF) is proposed in this paper. This method is based on the Particle Filter combing the Unscented Transformation (UT) with Iteration Kalman Filter (IKF), and it solved the instability of the precision for the conventional filtering methods and the degradation for the weight of the particle filter. The filtering result shows that the method of IUKPF can effectively restrain the random drift error under nonlinear and non Gaussian noise. The standard deviation for the output noise of MEMS gyroscope has decreased 81.9% by IUKPF which verifies the efficiency and superiority of this method.

Abstract: The sub-pixel allocation is a key technology for achieving high-precision measurement for micro electro mechanical system (MEMS). In this paper, a novel sub-pixel compensation algorithm based on an improved gradient algorithm utilized in a rough sub-pixel position is proposed to compensate the insufficient accuracy extracted by the surface fitting. And compared with traditional gradient used in the integer pixel, the proposed algorithm can reduce the error introduced by abandoning the higher order term without using iteration and second-order Taylor formula. The experimental results show that the displacement parameters calculated by the proposed algorithm is more accurate, and the method has a good noise resistance, it can meet high-precision positioning of MEMS motion image.

Abstract: To study the impact response characteristics of multilayer structure, cantilever-type electrothermal actuators based on MEMS, a composite cantilever-beam model consisting of two layers of materials, SiO₂ and Al, is built. By using the engineer mechanics theory, the von mise stress under the impacts in the fuze system can be obtained. Meanwhile, the Finite Element Method (FEM) simulation is made to get the deformation displacement of the fixed end and the von mises stress distribution of the model. Besides, the natural frequency response is studied. The results present the actuators response characteristics of impacts in the fuze system.

Abstract: With the intelligent development of small-caliber ammunition, the overall size of the fuze is compressed. In this paper, a theoretical method-energy statistical method has been proposed according to the MEMS S&A device. Taking the slider mass, micro-spring stiffness, latch mechanism size, and initial offset distance into account, the conversion relationship among each part of energy in the process is obtained. For an existing structure of MEMS S&A device, known parameters are utilized to reverse the overload value at arming condition. The ANSYS/LS-DYNA finite element analysis software is used for simulation analysis, thereby confirming the feasibility of theoretical calculations. Also, theoretical calculation error ε is obtained, which to be 0.7%. Energy statistical method and simulation analysis serve as theoretical references for the design of the MEMS S&A device.

Abstract: With the more and more micro mechanical parts are coming into the use of many fields, the micro machining is becoming a new tendency in the future manufacture industry. As a kind of common machining method, milling is also favor in the micro-fabrication field since its good machining precision and forming ability. In this work, cutting process simulation of micro-milling was done to analyze the influence of machining data and tool geometry on the cutting process such as temperature and stress distribution during machining by using ABAQUS software. The results from this simulation can provide some useful information for choosing reasonable cutting edge and machining data to improve surface integrity and prolong cutting tool life in micro-milling operation.

Abstract: This paper reviews some ground breaking development of RF MEMS technology in Australia at the UNSW, over the past decade. It presents some unique and novel designs using RF MEMS switches to achieve reconfigurable RF front-end circuits. These designs include multiport RF MEMS switches, switch matrices, reconfigurable filters and antennas. The resulting devices achieved RF performance that is unmatched by any existing RF andmicrowave technologies.

Abstract: Double fold reduction projection lithography objective lens with bi-telecentric configuration, consists of 6 lenses and the number aperture , is designed based on the optical design software Zemax. It uses the 405nm laser diode (LD) as light source. The spatial resolving capacity approaches to 5um. In a field of view of , its wave-front aberration is less than a quarter of wave-length and the distortion ratio is not more than. The imaging performance, in particular, the accurate modulation transfer function (MTF) value of the projection objective lens being fabricated by experiments is determined in this paper. Through analyzing the noise disturbance law in MTF tests, the result show that the projection objective lens has sub ten micrometer resolving ability.