A Study on the Optical and Electrical Properties of GZO/Pt/GZO Multilayered Transparent Electrodes for Photonic Applications

Moon Ki Jeong; Hee Chul Lee

doi:10.4028/www.scientific.net/AMR.905.78

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A Study on the Optical and Electrical Properties of GZO/Pt/GZO Multilayered Transparent Electrodes for Photonic Applications

Abstract:

We have proposed, prepared, and characterized Pt-inserted Ga-doped ZnO (GZO) transparent electrodes of GZO/Pt/GZO (GPG) multilayers on glass substrates. The GZO and Pt films were in-situ deposited by RF and DC sputtering without breaking vacuum, respectively. The grain structure and deposition rate of the GZO films grown on the Pt insertion layer were different from those of the GZO films sputtered on glass substrates. Pt-inserted GZO electrodes showed remarkably decreased resistivity although the thickness of the Pt layer was as thin as 9 nm. However, the optical transmittance of the GPG electrodes was severely degraded with an increasing thickness of the Pt layer. The structural, optical, and electrical properties of GPG multilayered transparent electrodes were affected by post-annealing conditions such as environment and temperature. That may be associated with an increase in crystallinity and inter-diffusion between Pt and GZO films.