Calculations of Absorbed Dose in Heavy-Ion Irradiated Phase-Change Memory Cells

Abstract:

Heavy ion irradiation on phase change memory cell was conducted using Monte Carlo simulations. Absorbed dose in the whole memory cell, as well as in its active layer was assessed. Phase change memory cell was modeled as a sandwiched structure of two TiW electrodes and ZnS-SiO₂ films as insulators surrounding the active region. The most commonly used phase change material, Ge₂Sb₂Te₅, was used as active layer of the cell. Ionization effects of heavy ion irradiation were investigated for various thicknesses of phase change layer and different ion energies.

• Periodical: Advanced Materials Research (Volume 906)
• Pages: 81-88
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.906.81
• Online since: April 2014
• Authors: Nevena Zdjelarević, Ljubinko Timotijević, Radeta Marić, Koviljka Stanković*, Miloš Vujisić
• Keywords: Absorbed Dose, Heavy Ion Irradiation, Monte Carlo Method, Phase Change Materials (PCM), Phase Change Memory

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