Investigate the Reliable and Accurate Pattern Transfer of IDE Silver Electrode Coated with Zinc Oxide Microwire for Biosensor Application

Abstract:

This paper illustrate a facile route to fabricate and develop zinc oxide microwire which acts as transducer for biosensor application. Pattern transfer process is conducted on the wafer substrate by using conventional photolithography process to form IDE electrode. The substrate is coated with positive photo-resist (PR) and exposed for UV light for 10 seconds. After development, the unexposed area is etched by using hydrochloric acid, HCI. In this study, zinc oxide material have become a remarkable choice for bio-sensing development due to large band gap and tailor for bio-molecular application. Zinc oxide solution was prepared through chemical route, that is by using sol-gel method. The coated ZnO films were annealed in furnace at 500°C for 2 hours. ZnO seed solution undergoes hydrothermal growth to synthesize ZnO microwires. ithThe substrate used for this study is p-type silicon wafer which is oxidized. SiO₂ layer is used because it acts as an insulator which is very essential for an electronic device to avoid electrical leakage and improve electron mobility. Further investigation of morphological and electrical characterization is conducted through SEM and I-V test .Average size diameter of Zno microwire is 0.45μm and exhibit 900μA of current at 5V.

• Periodical: Advanced Materials Research (Volume 925)
• Pages: 529-532
• DOI: https://doi.org/10.4028/www.scientific.net/AMR.925.529
• Online since: April 2014
• Authors: R. Haarindra Prasad*, Kai Long Foo, U. Hashim
• Keywords: Biosensor, IDE Electrode, Microwire, Photolithography Process, Photo-Resist, Sol-Gel, ZNO

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