Fabrication Comparison of the SCS-Based and SOI-Based Micromachining

Qing Hua Chen; Yan Mei Li; Ying Jun Chen; Wen Gang Wu

doi:10.4028/www.scientific.net/AMR.926-930.881

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HomeAdvanced Materials ResearchAdvanced Materials Research Vols. 926-930Fabrication Comparison of the SCS-Based and...

Fabrication Comparison of the SCS-Based and SOI-Based Micromachining

Abstract:

The two different fabrications of the Micro-Electro-Mechanical Systems (MEMS) mirrors were compared: a single-crystal-silicon (SCS)-based micromachining and a silicon-on-insulator (SOI)- based micromachining. While the SOI parts had significantly smaller curved device appearance, they were outperformed in most areas by the SCS parts. This was due primarily to the smaller stress factor in the device layer in the SOI parts compared to the polysilicon layer used in the SCS parts.

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Periodical:

Advanced Materials Research (Volumes 926-930)

Pages:

881-884

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.926-930.881

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Online since:

May 2014

Authors:

Qing Hua Chen*, Yan Mei Li, Ying Jun Chen, Wen Gang Wu

Keywords:

Comparision, Fabrication, MEMS, SCS, SOI

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* - Corresponding Author

References

[1] H. Hamaguchi, K. Sugano, T. Tsuchiya and O. Tabata, A Differential Capacitive Three-Axis SOI Accelerometer Using Vertical Comb Electrodes", Transducer, 07, Vol. 2, pp.1483-1486, (2007).

DOI: 10.1109/sensor.2007.4300425

Google Scholar

[2] K. Oda, F. Oohira, I. Ishimaru, T. Suzuki, Vertical Comb-Drive MEMS Mirror with a Sensing Function for Phase-Shift Devices, Proceedings of the 13th Intelligence Mechatronics Workshop, pp.299-304, 2008.

DOI: 10.1109/omems.2010.5672213

Google Scholar

[3] Zeng Yun, Liu Wen, Chen Long, Luo Yong and Xiao Qingming, A 1 × 2 Variable Optical Power Splitter Development, 1566 J. Lightw. Technol., Vol. 24 (2006) No. 3, pp.1566-1570.

DOI: 10.1109/jlt.2005.863231

Google Scholar

[4] I. W. Jung, S. Kim, and O. Solgaard, High-reflectivity broadband photonic crystal mirror MEMS scanner with low dependence on incident angle and polarization, J. Microelectromech. Syst. 18(4), 924–932, (2009).

DOI: 10.1109/jmems.2009.2021814

Google Scholar

[5] C. F. R. Mateus, M. C. Y. Huang, Y. Deng, A. R. Neureuther, and C. J. Chang-Hasnain, Ultrabroadband Mirror Using Low-Index Cladded Subwavelength Grating, IEEE Photon. Technol. Lett. 16(2), 518–520, (2004).

DOI: 10.1109/lpt.2003.821258

Google Scholar

[6] J. S. Kumar, A. Chakraborty, and B. N. Das, Scanning of cosecant beams generated by a tilted planar array of nonisotropic radiators, IEEE Trans. Antennas Propagat., vol. 39, p.919–925, June (1991).

DOI: 10.1109/8.86886

Google Scholar

[7] O. Kilic, S. Kim, W. Suh, Y. -A. Peter, A. S. Sudbø, M. F. Yanik, S. Fan, and O. Solgaard, Photonic crystal slabs demonstrating strong broadband suppression of transmission in the presence of disorders, Opt. Lett. 29(23), 2782–2784, (2004).

DOI: 10.1364/ol.29.002782

Google Scholar