Atmospheric Pressure Plasma-Enhanced CVD for Surface Modification: Principles and Applications

Abstract:

Article Preview

This review gives an overview of the characteristics of various non-thermal, nonequilibrium plasmas and outlines results of AP-PECVD with dielectric barrier discharges.

Info:

Periodical:

Edited by:

P. VINCENZINI

Pages:

1173-1177

DOI:

10.4028/www.scientific.net/AST.45.1173

Citation:

M. L. Hitchman and S. E. Alexandrov, "Atmospheric Pressure Plasma-Enhanced CVD for Surface Modification: Principles and Applications", Advances in Science and Technology, Vol. 45, pp. 1173-1177, 2006

Online since:

October 2006

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Price:

$35.00

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