New Advances in Forming Functional Ceramics for Micro Devices

Abstract:

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Micro electromechanical systems (MEMS) are finding uses in an increasing number of diverse applications. Currently the fabrication techniques used to produce such MEMS devices are primarily based on 2-D processing of thin films. The challenges faced by producing more complex structures (e.g. high aspect ratio, spans, and multi-material structures) require the development of new processing techniques. Potential solutions to these challenges based on low temperature processing of functional ceramics, selective chemical patterning, and micro-moulding are presented to show that it is possible to create complex functional ceramic structures which incorporate non-ceramic conducting and support structures. The capabilities of both techniques are compared and the relative advantages of each explored.

Info:

Periodical:

Edited by:

P. VINCENZINI

Pages:

2440-2447

DOI:

10.4028/www.scientific.net/AST.45.2440

Citation:

R.A. Dorey et al., "New Advances in Forming Functional Ceramics for Micro Devices", Advances in Science and Technology, Vol. 45, pp. 2440-2447, 2006

Online since:

October 2006

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Price:

$35.00

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