Some Investigations on Gallium Arsenide MEMS. Simulation of Microstructure Shapes

C.R. Tellier; G. Huve; Therese G. Leblois

doi:10.4028/www.scientific.net/AST.51.121

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HomeAdvances in Science and TechnologyAdvances in Science and Technology Vol. 51Some Investigations on Gallium Arsenide MEMS....

Some Investigations on Gallium Arsenide MEMS. Simulation of Microstructure Shapes

Abstract:

A study was made on the micromachining of GaAs in a H3PO4:H2O2:H2O solution with composition 1:9:1. In the first part etch rates and morphologies of etched structures were evaluated in order to characterize the anisotropy. The second part was devoted to numerical simulations of 3D etching shapes. For this purpose the database of the simulator TENSOSIM was determined. Comparison of theoretical 3D etching shapes with experimental shapes of micromachined structures supports the validity of the proposed database. So the simulator TENSOSIM is a convenient CAO tool for the design of new GaAs MEMS.

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Periodical:

Advances in Science and Technology (Volume 51)

Pages:

121-126

DOI:

https://doi.org/10.4028/www.scientific.net/AST.51.121

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Online since:

October 2006

Authors:

C.R. Tellier, G. Huve, Therese G. Leblois

Keywords:

GaAs, Micro Machining, Micro-Electromechanical System (MEMS), Simulation

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