Integrated Piezoelectrics for Smart Microsystems - A Teamwork of Substrate and Piezo

Sylvia Gebhardt; Dörthe Ernst; Bernhard Bramlage; Markus Flössel; Andreas Schönecker

doi:10.4028/www.scientific.net/AST.77.1

Paper Titles

Preface and Committees

Integrated Piezoelectrics for Smart Microsystems - A Teamwork of Substrate and Piezo
p.1

Modeling of 3D Magnetostrictive Systems with Application to Galfenol and Terfenol-D Actuators
p.11

Impact of Sputter Deposition Parameters on the Leakage Current Behavior of Aluminum Nitride Thin Films
p.29

Dielectric Properties of Ba_1-xLa_xTi_1-x/4O₃ Ceramics with Different La³⁺ Content
p.35

Multilayer Ceramic Capacitors Based on the PMN-PT-PFN Solid Solution
p.41

Ceramics PMN-PT-PFN for Multilayer Capacitors
p.47

Comparison of the Long-Term Stability of TiO₂ Hydrosols with Different Concentration of Nanoparticles
p.53

Study on the Fabrication of Visible Light Response Type N-Doped TiO₂ Photocatalyst by SPS
p.59

HomeAdvances in Science and TechnologyAdvances in Science and Technology Vol. 77Integrated Piezoelectrics for Smart Microsystems -...

Integrated Piezoelectrics for Smart Microsystems - A Teamwork of Substrate and Piezo

Abstract:

Microelectronic substrates like silicon, alumina and LTCC (Low Temperature Cofired Ceramics) allow for high robustness and reliability, 3D packaging (electrical connection, channels, cavities and membranes) as well as integration and application of electronic components whereas piezoceramic materials offer sensor and actuator operations. To combine the advantages of both, integrated solutions are of great interest. This paper deals with two approaches of monolithic integration, (i) screen printing of piezoceramic thick films on microelectronic substrates and subsequent post firing and (ii) integration of pre-fired piezoceramic components into green LTCC multilayer packages and subsequent sintering. Functionality of smart microsystems not only depends on the outer design and construction but to a great part on interaction of substrate and piezoceramic material properties. A thorough choice of materials as well as the understanding and prevention of chemical reactions are necessary to build effective systems.

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Periodical:

Advances in Science and Technology (Volume 77)

Pages:

1-10

DOI:

https://doi.org/10.4028/www.scientific.net/AST.77.1

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Online since:

September 2012

Authors:

Sylvia Gebhardt, Dörthe Ernst, Bernhard Bramlage, Markus Flössel, Andreas Schönecker

Keywords:

Actuator, LTCC/PZT Module, MEMS, Microsystems, Multilayer, Piezoceramic, PZT, Sensor, Structural Health Monitoring (SHM), Thick Film, Ultrasonic Transducer

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References

[1] M. Kosec, Processing of Ferroelectric Ceramic Thick Films, in: L. Pardo, J. Ricote (Eds.), Multifunctional Polycrystalline Ferroelectric Materials: Processing and Properties, Springer Series in Material Science, Dortrecht, Heidelberg, London, New York, 2011, pp.39-61

DOI: 10.1007/978-90-481-2875-4_2

Google Scholar

[2] R.N. Torah, S.P. Beeby, M.J. Tudor, N.M. White, Thick-Film Piezoceramics and Devices, J Electroceram (2007) 19 95-110

DOI: 10.1007/s10832-007-9040-7

Google Scholar

[3] S. Gebhardt, A. Schönecker, C. Bruchmann, Integrated Actuators Based on PZT Thick Films for Microsystems Applications, Proc. ACTUATOR 2010, pp.122-125, www.actuator.de

Google Scholar

[4] M. Flössel, S. Gebhardt, A. Schönecker, A. Michaelis, Development of a Novel Sensor-Actuator-Module with Ceramic Multilayer Technology, Journ Ceram Sci Tech, 01 (2010) 01, pp.55-58

Google Scholar

[5] S. Gebhardt, L. Seffner, F. Schlenkrich A. Schönecker, PZT Thick Films for Sensor and Actuator Applications, J Europ Ceram Soc, 27 (2007) 13-15, pp.4177-4180

DOI: 10.1016/j.jeurceramsoc.2007.02.122

Google Scholar

[6] S. Gebhardt, T.Rödig, U.Partsch, A.J. Schönecker, Development of Micro-Integrated Sensors and Actuators Based on PZT Thick Films, Proc. EMPC 2007, pp.177-181

Google Scholar

[7] S. Gebhardt, A. Schönecker, C. Bruchmann, E. Beckert, G. Rodrigues, R. Bastais, Active Optical Structures by Use of PZT Thick Films, Proc. CICMT 2008, pp.000087-000093

Google Scholar

[8] B. Bramlage, S. Gebhardt, Development of PZT Thick Film Actuators for Active Micro-Optics, Proc. ACTUATOR 2010, pp.594-596, www.actuator.de

Google Scholar

[9] B. Bramlage, D. Ernst, S. Gebhardt, Analysis of Large Signal Performance of Screen-Printed PZT Thick Film Actuators, submitted to Journal of Sensors and Actuators, (2012)

Google Scholar

[10] M. Flössel, U. Scheithauer, S. Gebhardt, A. Schönecker, A. Michaelis, Robust LTCC/PZT Sensor-Actuator-Module for Aluminium Die Casting, Proc. EMPC 2009, art. no. 5272855

DOI: 10.1002/9783527627110.ch83

Google Scholar

[11] M. Sobocinsky, R. Zwierz, J. Juuti, H. Jantunen, L. Golonka, Electrical and Electromechanical Characteristics of LTCC embedded Piezoelectric Bulk Actuators, Advances in Applied Ceramics 109 (2010) 3, pp.135-138

DOI: 10.1179/174367509x12502621261370

Google Scholar

[12] C. Bruchmann, T. Burkhardt, A. Kamm, S. Gebhardt, E. Beckert, R. Eberhardt, A. Tünnermann, New results of unimorph laser mirrors with screen printed actuator", Proc. SPIE – The International Society for Optical Engineering, Proc. SPIE, Vol. 7595, 75950J (2010);

DOI: 10.1117/12.843810

Google Scholar

[13] U. Partsch, S. Gebhardt, D. Arndt, H. Georgi, H. Neubert, D. Fleischer, M. Gruchow, LTCC-Based Sensors for Mechanical Quantities, Proc. EMPC 2007, pp.381-388

Google Scholar

[14] M. Flössel, U. Lieske, T. Klesse, S. Gebhardt, Ceramic Based Structural Health Monitoring (SHM) Modules for Rough Environment, submitted to Proc. ACTUATOR 2012, www.actuator.de

Google Scholar