Functional RF Devices Powered by MEMS Technologies

Abstract:

This paper discusses use of MEMS technologies in radio frequency (RF) frontend. First, configuration of RF front-end in current wireless communication systems is surveyed, and research trends of the flexible RF front-end and software defined radio (SDR) are discussed. Second, various RF tunable filters are introduced, and we discuss how high performances are expected by the use of tunable RF surface and bulk acoustic wave (SAW/BAW) filters provided that above mentioned key technologies are developed. Finally, our attempts for realization of tunable RF SAW/BAW filters are introduced.

• Periodical: Advances in Science and Technology (Volume 81)
• Pages: 75-83
• DOI: https://doi.org/10.4028/www.scientific.net/AST.81.75
• Online since: September 2012
• Authors: Ken Ya Hashimoto, Hideki Hirano, Shuji Tanaka, Masayoshi Esashi
• Keywords: BST Varactor, Bulk Acoustic Wave Device, Hetero Integration, Lost Wafer Process, MEMS Varactor, Software Defined Radio, Surface Acoustic Wave Device, Tunable Filter

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