[1]
E. R. Brown, RF-MEMS switches for reconfigurable integrated circuits, IEEE Transactions on Microwave Theory and Techniques 46 (1998) 1868-1880.
DOI: 10.1109/22.734501
Google Scholar
[2]
A. Malczewski, S. Eshelman, B. Pillans, J. Ehmke, C. L. Goldsmith, X-band RF MEMS phase shifters for phased array applications, IEEE Microwave and Guided Wave Letters 9 (1999) 517-519.
DOI: 10.1109/75.819417
Google Scholar
[3]
M. Kaynak et al., BiCMOS embedded RF-MEMS switch for above 90 GHz applications using backside integration technique, IEEE International Electron Devices Meeting (IEDM) (2010) 36. 5. 1-36. 5. 4.
DOI: 10.1109/iedm.2010.5703488
Google Scholar
[4]
K. Chen, A. Kovacs, D. Peroulis, Anti-biased RF MEMS varactor topology for 20–25 dB linearity enhancement, IEEE MTT-S International Microwave Symposium (2010) 1142-1145.
DOI: 10.1109/mwsym.2010.5517852
Google Scholar
[5]
S. Aliouane, A. B. Kouki, R. Aigner, RF-MEMS switchable inductors for tunable bandwidth BAW filters, International Conference on Design and Technology of Integrated Systems in Nanoscale Era (DTIS) (2010) 1-6.
DOI: 10.1109/dtis.2010.5487536
Google Scholar
[6]
D. J. Chung, R. G. Polcawich, J. S. Pulskamp, J. Papapolymerou, Reduced-Size Low-Voltage RF MEMS X-Band Phase Shifter Integrated on Multilayer Organic Package, IEEE Transactions on Components, Packaging and Manufacturing Technology (2012) 1-6.
DOI: 10.1109/tcpmt.2012.2184112
Google Scholar
[7]
A. E. Festo, K. Folgero, K. Ullaland, K. M. Gjertsen, A six bit, 6–18 GHz, RF-MEMS impedance tuner for 50 Ω systems, European Microwave Conference (2009) 1132-1135.
DOI: 10.23919/eumc.2009.5296361
Google Scholar
[8]
K. Y. Chan, S. Fouladi, R. Ramer, R. R. Mansour, RF MEMS Switchable Interdigital Bandpass Filter, IEEE Microwave and Wireless Components Letters 22 (2012) 44-46.
DOI: 10.1109/lmwc.2011.2176926
Google Scholar
[9]
M. Daneshmand, R. R. Mansour, RF MEMS Satellite Switch Matrices, IEEE Microwave Magazine 12 (2011) 92-109.
DOI: 10.1109/mmm.2011.941417
Google Scholar
[10]
J. Iannacci, F. Giacomozzi, S. Colpo, B. Margesin, M. Bartek, A general purpose reconfigurable MEMS-based attenuator for Radio Frequency and microwave applications, IEEE EUROCON Conference (2009)1197-1205.
DOI: 10.1109/eurcon.2009.5167788
Google Scholar
[11]
H. J. de los Santos, RF MEMS circuit design for wireless communications, Artech House, (2002).
Google Scholar
[12]
C. T. -C. Nguyen, Transceiver front-end architectures using vibrating micromechanical signal processors, Digest of Papers of Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (2001) 23-32.
DOI: 10.1109/smic.2001.942335
Google Scholar
[13]
S. Lucyszyn, Advanced RF MEMS, Cambridge University Press, Cambridge, (2010).
Google Scholar
[14]
A. L. Hartzell, M. G. da Silva, H. R. Shea, MEMS Reliability, Springer, (2011).
Google Scholar
[15]
M. A. Taghvaei, P. -V. Cicek, K. Allidina, F. Nabki, M. N. El-Gamal, A MEMS-based temperature-compensated vacuum sensor for low-power monolithic integration, IEEE International Symposium on Circuits and Systems (ISCAS) (2010) 3276-3279.
DOI: 10.1109/iscas.2010.5537914
Google Scholar
[16]
A. P. Malshe, Fabrication, Packaging and Integration of MEMS and Related Microsystems, Springer, (2012).
Google Scholar
[17]
J. Youngkyun, H. Doh, J. Sungyong, D. S. -W. Park, J. -B. Lee, CMOS VCO & LNA implemented by air-suspended on-chip RF MEMS LC, Midwest Symposium on Circuits and Systems (MWSCAS) 1 (2004) I-373-6.
DOI: 10.1109/mwscas.2004.1354005
Google Scholar
[18]
V. Ziegler, W. Gautier, A. Stehle, B. Schoenlinner, U. Prechtel, Challenges and opportunities for RF-MEMS in aeronautics and space - The EADS perspective, Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF) (2010).
DOI: 10.1109/smic.2010.5422985
Google Scholar
[19]
F. Giacomozzi, V. Mulloni, S. Colpo, J. Iannacci, B. Margesin, A. Faes, A Flexible Technology Platform for the Fabrication of RF-MEMS Devices, Proceedings of the International Semiconductor Conference 1 (2011) 155-158.
DOI: 10.1109/smicnd.2011.6095744
Google Scholar
[20]
F. Giacomozzi, V. Mulloni, S. Colpo, J. Iannacci, B. Margesin, A. Faes, A Flexible Fabrication Process for RF MEMS Devices, Romanian Journal of Information Science and Technology (ROMJIST) 14 (2011) 259-268.
DOI: 10.1109/smicnd.2011.6095744
Google Scholar
[21]
T. Nakatani, A. T. Nguyen, T. Shimanouchi, M. Imai, S. Ueda, I. Sawaki, K. Satoh, Single crystal silicon cantilever-based RF-MEMS switches using surface processing on SOI, Proceedings of the International Conference on Micro Electro Mechanical Systems (2005).
DOI: 10.1109/memsys.2005.1453898
Google Scholar
[22]
F. Solazzi, G. Resta, V. Mulloni, B. Margesin, P. Farinelli, Influence of beam geometry on the dielectric charging of RF MEMS switches, Proceedings of the Microwave Integrated Circuits Conference (EuMIC) (2011) 398-401.
Google Scholar
[23]
F. Casini, P. Farinelli, G. Mannocchi, S. DiNardo, B. Margesin, G. De Angelis, R. Marcelli, O. Vendier, L. Vietzorreck, High performance RF-MEMS SP4T switches in CPW technology for space applications, Proceedings of the Microwave Conference (EuMC) (2010).
DOI: 10.1109/eumc.2006.281475
Google Scholar
[24]
A. Ocera, P. Farinelli, P. Mezzanotte, R. Sorrentino, B. Margesin, F. Giacomozzi, A Novel MEMS-Tunable Hairpin Line Filter on Silicon Substrate, Proceedings of the Microwave Conference (2006) 803-806.
DOI: 10.1109/eumc.2006.281041
Google Scholar