Optical Characteristics of Tungsten Oxide Thin Films Prepared by Sputtering Technique
The optical properties of tungsten oxide (WO3) films prepared by DC sputtering on unheated glass substrates with different film thicknesses have been studied. The structural characteristics of the samples were investigated using X-ray diffraction. The optical properties of the prepared films were studied by transmittance and reflectance measurements, and the integrated transmittance (TUV, TVIS, and TNIR) and absorption (AUV, AVIS, and ANIR) in UV, VIS and NIR regions. The integrated UV absorption and transmittance are varied with the film thicknesses, also, no remarkable change in VIS and NIR regions was observed. The dependence of refractive index as well as extinction coefficient on wavelength was also reported. The energy gap was calculated and is located around 3.25 eV.
David J. Fisher
S.A. Aly "Optical Characteristics of Tungsten Oxide Thin Films Prepared by Sputtering Technique", Defect and Diffusion Forum, Vols. 295-296, pp. 11-17, 2009