Diffusion and Solubility of Common Microelectronic Airborne Molecular Contaminants into PEI Thin Polymer Membranes and its Related Contamination Control Applications

Abstract:

Sorption and outgassing mechanisms of corrosive gases in relation with wafers lost yield due to polymer container Front Opening Unified Pod (FOUP), is crucial information to understand the cross contamination between FOUP and wafers. This occurs when FOUPs (made in polymers) outgas contaminants into the wafer surrounding minienvironment. Gas sorption is governed by surface adsorption, followed by diffusion and solubility and then, permeability appears as a key parameter to understanding these cross contamination phenomena. In this work, we present the transport coefficients obtained for gaseous HF and HCl at cleanroom conditions (Patm, 21 ± 2°C & 40% RH) at two different HX concentrations using the sorption kinetic method, based on Fick’s law, for thin films (≈50μm) of PEI. Finally, we establish the relationship between the sorption parameters of a polymer thin film and the potential contamination transfer from a FOUP whose main polymer material is similar.

• Periodical: Defect and Diffusion Forum (Volume 400)
• Pages: 109-116
• DOI: https://doi.org/10.4028/www.scientific.net/DDF.400.109
• Online since: March 2020
• Authors: P. González-Aguirre*, Minh Phuong Tran, Fernando Herrán, Sung In Moon, Jorgen Lundgren, Carlos Beitia, Hervé Fontaine
• Keywords: Fick’s Law, FOUP Polymers, HX Transport Parameters, PEI, Sorption Kinetics

References

[1] SEMI International Standards. F21-1016 - Classification of Airborne Molecular Contaminant Levels in Clean Environments. Available at ams.semi.org, (2016).

[2] International Roadmap for Devices and Systems (IRDS), Yield Enhancement https://irds.ieee.org/editions/(2017).

[3] P. González-Aguirre, H. Fontaine, C. Beitia, J. Ohlsen, J. Lundgren, P. Lee. A comparative study of the HF sorption and outgassing ability of different Entegris FOUP platforms and materials. Microelectronic Engineering, 105 (2013), 113-188.

DOI: 10.1016/j.mee.2012.12.005

[4] T.Q. Nguyen, H. Fontaine, Y. Borde, V. Jacob. Identification and quantification of FOUP molecular contaminants inducing defects in integrated circuits manufacturing Microelectronic Engineering, 105, (2013), 124-129.

DOI: 10.1016/j.mee.2012.04.008

[5] H. Fontaine, S. Cetre, M. Villerot, A. Danel. Study of the volatile organic contaminants absorption and their reversible outgassing by FOUPs, Solis State Phenomena, (2009), 143-146.

DOI: 10.4028/www.scientific.net/ssp.145-146.143

[6] P. González-Aguirre, H. Fontaine, C. Beitia, J. Ohlsen, J. Lundgren, P. Lee. A comparative study of the HF sorption and outgassing ability of different Entegris FOUP platforms and materials. Microelectronic Engineering, 105 (2013), 113-188.

DOI: 10.1016/j.mee.2012.12.005

[7] F. Herrán, P. González-Aguirre, H. Fontaine, C. Beitia, J. Ohlsen, J. Lundgren, Comparison of HF and HCl cross-contamination between different ENTEGRIS FOUP platforms and Cu-coated wafers. Microelectronic Engineering, 169, (2017), 34-38.

DOI: 10.1016/j.mee.2016.11.017

[8] P. González-Aguirre, H. Fontaine, C. Beitia, R. Pastorello, J. Ohlsen, J. Lundgren, HF transport coefficients in polymers used for microelectronic applications. Defect and Diffusion Forum 367 (2016), 68-76.

DOI: 10.4028/www.scientific.net/ddf.367.68

[9] S. I. Moon, C. W. Extrand, Humidity Rise after Purge in Micro-Environments, Advanced Semiconductor Manufacturing Conference, (2012), 308-310.

DOI: 10.1109/asmc.2012.6212917

[10] J.L. Duda. Molecular diffusion in polymeric systems. Pure & Appl Chem 57 (1985), 1681-1690.

[11] J.G. Wijmans, R.W. Baker. The solution-diffusion model: a review, Journal of Membrane Science 107(1995), 1-21.

[12] H. Fontaine Y. Borde, C. Brych, A. Danel. Characterization of the HCl absorption & outgassing mechanism by FOUP's polymers. ECS Transactions, 25,5, (2009), 139-146.

DOI: 10.1149/1.3202646

[13] Garrido L. Guzman J. Influence of Diffusion Time on the Diffusion Coefficients of Gases in Polymers Determined by Pulsed Gradient Spin Echo NMR. Macromolecules 51, (2018), 8681-8688.

DOI: 10.1021/acs.macromol.8b02107

[14] Liaw D-J, Wang K-L, Huang Y-C, Lee K-R, Lai J-Y, Ha C-S. Advanced polyimide materials: Syntheses, physical properties and applications, Progress in Polymer Science, 37 (2012), 901-974.

DOI: 10.1016/j.progpolymsci.2012.02.005

[15] Szczesniak M.M, Scheiner S. Bouteiller Y. Theoretical study of H2O-HF and H2O-HCl: Comparison with the experiment. J Chem Phys, 81, (1984), 5024-5030.

[16] N. Santatriniaina, J. Deseure, T. Q. Nguyen, H. Fontaine, C. Beitia, L. Rakotomanana. Mathematical Modeling of the AMCs Cross-Contamination Removal in the FOUPs: Finite Element Formulation and Application in FOUP's Decontamination, International Journal of Mathematical, Computational Science and Engineering, Vol 8, No 4, (2014), 30-35.

DOI: 10.14419/ijamr.v3i3.2829