The Behavior of Transition Metals in Silicon during Annealing Transients

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Periodical:

Edited by:

D. Gupta, A.D. Romig and M.A. Dayananda

Pages:

239-252

DOI:

10.4028/www.scientific.net/DDF.59.239

Citation:

D.R. Sparks et al., "The Behavior of Transition Metals in Silicon during Annealing Transients", Defect and Diffusion Forum, Vol. 59, pp. 239-252, 1988

Online since:

January 1991

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$35.00

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