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HomeJournal of Nano ResearchJournal of Nano Research Vol. 32Nanomorphology of Aluminum Oxide Layer after Argon...

Nanomorphology of Aluminum Oxide Layer after Argon Ion Bombardment

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Abstract:

Auger electron spectroscopy (AES) and electron energy loss spectroscopy (EELS) studied the interaction of argon ions with a natural oxide layer of polycrystalline aluminum. It was found that the bombardment of argon ions with an energy lower sputtering threshold Al₂O₃ leads to accumulation of ions bombarding the interstitial voids in the surface, thereby forming a solid solution of atoms of the target, the argon ions and nitrogen ion beam, the captured residual gas from the chamber of the spectrometer.

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Journal of Nano Research Vol. 32

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Periodical:

Journal of Nano Research (Volume 32)

Pages:

60-65

DOI:

https://doi.org/10.4028/www.scientific.net/JNanoR.32.60

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Online since:

May 2015

Authors:

Ashkhotov Oleg, Irina Ashkhotova

Keywords:

Alumina, Argon, Atomic Force Microscopy (AFM), Bombardment, Electron, Ion, Spectroscopy, Surface, Thin Film

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© 2015 Trans Tech Publications Ltd. All Rights Reserved

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