Controlling the Size of Interior Core of Silicon Nanowires

Abstract:

As the physical and electrical properties of silicon nanowires (SiNWs) are determined by their dimension, it is necessary to control their dimension to integrate them in a device. SiNWs were synthesized via Vapor-Liquid-Solid (VLS) mechanism in hot-wire chemical vapor process (HWCVP) technique using silane as a Si source and Sn as a catalyst. Different sizes of nano-template have been made by depositing of different amount of Sn using thermal evaporation method. The size of nano-template is found to be increased with the quantity of Sn. The diameter of resulted SiNWs depends on the size of the nano-template and it increases with the nano-template size. However, the diameter of SiNWs is found to be much larger than the used nano-template which is due to the deposition of silicon film on the sidewalls of the growing SiNWs. It is demonstrated here that the diameter of the interior core of SiNWs can be controlled desirable by adjusting the size of the nano-template.

• Periodical: Journal of Nano Research (Volume 45)
• Pages: 193-198
• DOI: https://doi.org/10.4028/www.scientific.net/JNanoR.45.193
• Online since: January 2017
• Authors: Ankur Soam*, Rajiv Dusane
• Keywords: HWCVP, SiNWs, Sn Catalyst, VLS

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