Microstructure of Zinc Oxide Grown by rf Magnetron Sputtering: Aspect of Oxygen Vacancy

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Periodical:

Key Engineering Materials (Volumes 181-182)

Edited by:

N. Murata, K. Shinozaki and T. Kimura

Pages:

101-104

DOI:

10.4028/www.scientific.net/KEM.181-182.101

Citation:

T. Ogino et al., "Microstructure of Zinc Oxide Grown by rf Magnetron Sputtering: Aspect of Oxygen Vacancy", Key Engineering Materials, Vols. 181-182, pp. 101-104, 2000

Online since:

May 2000

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$35.00

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