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HomeKey Engineering MaterialsKey Engineering Materials Vols. 181-182Electrical Properties of SrBi2Ta2O9 (SBT) Thin...

Electrical Properties of SrBi₂Ta₂O₉ (SBT) Thin Film Prepared by Metalorganic Chemical Vapor Deposition

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Electroceramics in Japan III

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Periodical:

Key Engineering Materials (Volumes 181-182)

Pages:

93-100

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.181-182.93

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Online since:

May 2000

Authors:

N. Nukaga, Hiroshi Funakubo, Ishikawa Kunio, E. Shigeno, Yutaka Sawada

Keywords:

Chemical State, Leakage Character, MOCVD, SrBi₂Ta₂O₉, X-Ray Photoelectron Spectroscopy (XPS)

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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