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HomeKey Engineering MaterialsKey Engineering Materials Vols. 206-213Structural Characterization of Amorphous Carbon...

Structural Characterization of Amorphous Carbon Nitride Thin Films Prepared by Pulsed Laser Deposition

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Euro Ceramics VII

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Periodical:

Key Engineering Materials (Volumes 206-213)

Pages:

531-534

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.206-213.531

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Online since:

December 2001

Authors:

Yoshifumi Aoi, Kunio Sakurada, Kojiro Ono, Eiji Kamijo

Keywords:

Carbon Nitride, Pulsed Laser Deposition (PLD), Structural Characterisation, Thin Film

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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