Structural Characterization of Amorphous Carbon Nitride Thin Films Prepared by Pulsed Laser Deposition

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Periodical:

Key Engineering Materials (Volumes 206-213)

Main Theme:

Edited by:

C. Kermel, V. Lardot, D. Libert and I. Urbain

Pages:

531-534

DOI:

10.4028/www.scientific.net/KEM.206-213.531

Citation:

Y. Aoi et al., "Structural Characterization of Amorphous Carbon Nitride Thin Films Prepared by Pulsed Laser Deposition", Key Engineering Materials, Vols. 206-213, pp. 531-534, 2002

Online since:

December 2001

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$35.00

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