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HomeKey Engineering MaterialsKey Engineering Materials Vols. 214-215Fabrication of Micropatterned Dielectric Thin...

Fabrication of Micropatterned Dielectric Thin Films on Self-Assembled Monolayers

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Asian Ceramic Science for Electronics I

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Periodical:

Key Engineering Materials (Volumes 214-215)

Pages:

157-162

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.214-215.157

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Online since:

July 2001

Authors:

Yoshitake Masuda, Dejun Wang, Won Seon Seo, Kunihito Koumoto

Keywords:

Micro-Device, Micropatterning, Selective Deposition, Self-Assembled Monolayer (SAM), Thin Film, TiO₂

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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