Fabrication of Micropatterned Dielectric Thin Films on Self-Assembled Monolayers

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Periodical:

Key Engineering Materials (Volumes 214-215)

Edited by:

M. Murata, K. Koumoto and T. Takenaka, S. Fujitsu

Pages:

157-162

DOI:

10.4028/www.scientific.net/KEM.214-215.157

Citation:

Y. Masuda et al., "Fabrication of Micropatterned Dielectric Thin Films on Self-Assembled Monolayers", Key Engineering Materials, Vols. 214-215, pp. 157-162, 2002

Online since:

July 2001

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$35.00

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