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HomeKey Engineering MaterialsKey Engineering Materials Vols. 214-215Control of Crystal Structure of SrBi2Ta2O9 Thin...

Control of Crystal Structure of SrBi₂Ta₂O₉ Thin Films by UV Irradiation

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Asian Ceramic Science for Electronics I

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Periodical:

Key Engineering Materials (Volumes 214-215)

Pages:

145-150

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.214-215.145

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Online since:

July 2001

Authors:

Kaori Nishizawa, Takeshi Miki, Kazuyuki Suzuki, Kazumi Kato

Keywords:

Crystallinity, Sol-Gel Method, SrBi₂Ta₂O₉ Thin Films, Surface Roughness (SR), Uv Irradiation

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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