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HomeKey Engineering MaterialsKey Engineering Materials Vols. 214-215Electrical Properties and Characterization of...

Electrical Properties and Characterization of In₂O₃(ZnO)_m Thin Films

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Asian Ceramic Science for Electronics I

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Periodical:

Key Engineering Materials (Volumes 214-215)

Pages:

199-202

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.214-215.199

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Online since:

July 2001

Authors:

Tsuyoshi Ogino, Mamabu Komatsu, Naoki Ohashi, Isao Sakaguchi, Shunichi Hishita, Tadashi Takenaka, Hajime Haneda

Keywords:

Electrical Properties, Indium Zinc Oxide, Sputtering

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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