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HomeKey Engineering MaterialsKey Engineering Materials Vol. 227Web Based Process and Material Selection for MEMS...

Web Based Process and Material Selection for MEMS Design and Manufacturing

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Modeling of Materials

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Periodical:

Key Engineering Materials (Volume 227)

Pages:

247-252

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.227.247

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Online since:

August 2002

Authors:

X.F. Zha, Hao Du

Keywords:

Material Selection, Micro-Electromechanical System (MEMS), Modeling Tool, Process Selection, Simulation Tool, WWW

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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