Web Based Process and Material Selection for MEMS Design and Manufacturing

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Edited by:

C.-h. Chiu, Z. Chen, H. Gao, K.Y. Lam, A.A.O. Tay

Pages:

247-252

DOI:

10.4028/www.scientific.net/KEM.227.247

Citation:

X.F. Zha and H. Du, "Web Based Process and Material Selection for MEMS Design and Manufacturing", Key Engineering Materials, Vol. 227, pp. 247-252, 2002

Online since:

August 2002

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$35.00

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