Influence of Different Unheated Substrates on the Properties of ITO Thin Films Deposited by rf-PERTE

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Periodical:

Key Engineering Materials (Volumes 230-232)

Edited by:

Teresa Vieira

Pages:

567-570

DOI:

10.4028/www.scientific.net/KEM.230-232.567

Citation:

C. Nunes de Carvalho et al., "Influence of Different Unheated Substrates on the Properties of ITO Thin Films Deposited by rf-PERTE", Key Engineering Materials, Vols. 230-232, pp. 567-570, 2002

Online since:

October 2002

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$35.00

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