Influence of Different Unheated Substrates on the Properties of ITO Thin Films Deposited by rf-PERTE

C. Nunes de Carvalho; A.L. Luís; G. Lavareda; A. Amaral

doi:10.4028/www.scientific.net/KEM.230-232.567

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Influence of Different Unheated Substrates on the Properties of ITO Thin Films Deposited by rf-PERTE

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Key Engineering Materials (Volumes 230-232)

Pages:

567-570

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.230-232.567

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Online since:

October 2002

Authors:

C. Nunes de Carvalho, A.L. Luís, G. Lavareda, A. Amaral

Keywords:

Flexible Substrate, Indium Tin Oxide (ITO), rf-Plasma Enhanced Reactive Thermal Evaporation rf-PERTE, Room Temperature Properties, Scanning Electron Microscope (SEM)

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References

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