Influence of the Plasma Regime on the Structural, Optical and Transport Properties of a-Si:H Thin Films

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Periodical:

Key Engineering Materials (Volumes 230-232)

Edited by:

Teresa Vieira

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583-586

Citation:

H. Águas et al., "Influence of the Plasma Regime on the Structural, Optical and Transport Properties of a-Si:H Thin Films", Key Engineering Materials, Vols. 230-232, pp. 583-586, 2002

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October 2002

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