Structural and Thermal Behaviour of a W-Ti-N Sputtered Film after Thermal Annealing

Abstract:

Article Preview

Info:

Periodical:

Key Engineering Materials (Volumes 230-232)

Edited by:

Teresa Vieira

Pages:

627-630

DOI:

10.4028/www.scientific.net/KEM.230-232.627

Citation:

E. Le Patézour and A. Cavaleiro, "Structural and Thermal Behaviour of a W-Ti-N Sputtered Film after Thermal Annealing", Key Engineering Materials, Vols. 230-232, pp. 627-630, 2002

Online since:

October 2002

Export:

Price:

$35.00

In order to see related information, you need to Login.