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HomeKey Engineering MaterialsKey Engineering Materials Vols. 230-232Structural and Thermal Behaviour of a W-Ti-N...

Structural and Thermal Behaviour of a W-Ti-N Sputtered Film after Thermal Annealing

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Advanced Materials Forum I

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Periodical:

Key Engineering Materials (Volumes 230-232)

Pages:

627-630

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.230-232.627

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Online since:

October 2002

Authors:

E. Le Patézour, Albano Cavaleiro

Keywords:

Hard Coating, Residual Stress, Thermal Annealing, W-Ti-N

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Сopyright:

© 2002 Trans Tech Publications Ltd. All Rights Reserved

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[1] – J.C. Oliveira, A. Cavaleiro and C.M.A. Brett, Corrosion Science, 42(2000)1881.

[2] – J.M. Antunes, A. Cavaleiro, L.F. Menezes, M.I. Simões and J.V. Fernandes, submitted to publication to Surf. Coat. Technol.

[3] – C.N. Kouyumdjied, I.V. Ivanov and R.R. Tanov, Surf. Coat. Technol., 113(1999)113.

[4] - C. Louro, F. Teixeira-Dias, A. Cavaleiro, LF. Menezes, submitted to Materials Science Forum. 2,16 2,17 2,18 2,19 2,20 2,21 Tamb 600ºC 700ºC 800ºC 1000ºC d (200) [Aº] 2,0 2,5 3,0 3,5 Width (�2�(�2�(�2�(�2� º) 304 M2 304 M2 0 1000 2000 300040 42 44 46 48 50 52 54 2 �� (º) Intensity (u.a.) Round substrate Strip plate