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Structural and Thermal Behaviour of a W-Ti-N Sputtered Film after Thermal Annealing

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Periodical:

Key Engineering Materials (Volumes 230-232)

Pages:

627-630

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.230-232.627

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Cite this paper

Online since:

October 2002

Authors:

E. Le Patézour, Albano Cavaleiro

Keywords:

Hard Coating, Residual Stress, Thermal Annealing, W-Ti-N

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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References

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