Growth Model of Gas Species Produced by the Hot-Wire and Hot-Wire Plasma-Assisted Techniques

Abstract:

Article Preview

Info:

Periodical:

Key Engineering Materials (Volumes 230-232)

Edited by:

Teresa Vieira

Pages:

603-606

Citation:

R. Martins et al., "Growth Model of Gas Species Produced by the Hot-Wire and Hot-Wire Plasma-Assisted Techniques", Key Engineering Materials, Vols. 230-232, pp. 603-606, 2002

Online since:

October 2002

Export:

Price:

$38.00

[1] G. Turban, Y. Catherine and B. Grolleau, Thin Solid Films 67 (1980) p.309.

[2] A. Matsuda and K. Tanaka, Thin Solid Films, 92 (1982) p.171.

[3] T. Tagagi, R. Hayashi, G. Gangulty, M. Kondo and A. Matsuda, Thin Sol. Fil., 345 (1999) p.75.

[4] Laurence E. Kline, William D. Partlow and William E. Bies, J. Appl. Phys. 65 (1989) p.70.

[5] A. Roth, F.J. Comes, W. Beyer, Thin Solid Films 293 (1997) 83.

[6] M. Vieira, A. Maçarico, R. Martins, I. Ferreira and L. Guimarães, MRS Proc. 149 (1989) 87.

[7] Alan Gallagher in, Proceed. of 1 st Int. Conf. On Cat-CVD (Hot-Wire CVD) Process, November 2000, edited by H. Matsumura and R.E.I. Schropp, p.55.