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HomeKey Engineering MaterialsKey Engineering Materials Vols. 230-232Influence of Heat Treatment on the Structure of...

Influence of Heat Treatment on the Structure of W-Si-N Sputtered Films

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Periodical:

Key Engineering Materials (Volumes 230-232)

Pages:

640-643

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.230-232.640

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Online since:

October 2002

Authors:

Luís Manuel Silva Ferreira, C. Louro, Albano Cavaleiro, Bruno Trindade

Keywords:

Silicon, Sputtering, Structural Evolution, Tungsten Nitride

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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