Influence of Heat Treatment on the Structure of W-Si-N Sputtered Films

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Periodical:

Key Engineering Materials (Volumes 230-232)

Edited by:

Teresa Vieira

Pages:

640-643

Citation:

L. M. S. Ferreira et al., "Influence of Heat Treatment on the Structure of W-Si-N Sputtered Films", Key Engineering Materials, Vols. 230-232, pp. 640-643, 2002

Online since:

October 2002

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[1] - C. Louro, A. Cavaleiro, Surf. Coat. Technol. 116 (1999) 74.

[2] - C. Louro, A. Cavaleiro, Thin Solid Films, 343-344 (1999) 50.

[3] - C. Louro, A. Cavaleiro, Surf. Coat. Technol., 123 (2000) 192.

[4] - Y. Hirohata, N. Shimamoto, T. Hino, T. Yamashima, Thin Solid Films, 253 (1994) 425.

[5] - R. Riedel, M. Seher, J. Eur. Ceram. Soc., 7 (1991) 21.

[6] - S. Veprek, M. Haussmann, S. Reiprich, J. Vac. Sci. Technol. A, 14 (1996) 46.

[7] - S. Veprek, P. Nesládek, A. Niederhofer, F. Glatz, M. Jílek, M. Síma, Surf. Coat. Technol., 108/109 (1998) 138.

[8] - M. Diserens, J. Patscheider, F. Lévy, Surf. Coat. Technol., 108-109 (1998) 241.

[9] - J. Musil, D. Hovorka, Czech. J. Phys., 48 (1998) 963.

[10] - C. Louro, A. Cavaleiro, Surf. Coat. Technol., 142-144 (2001) 964. W73Si10N17 W77Si8N15 W76Si9N15 W64Si9N27 W69Si23N8 W71Si20N9 W71Si20N9 W71Si21N8.