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HomeKey Engineering MaterialsKey Engineering Materials Vols. 238-239Improvement of Machined Surface Quality in...

Improvement of Machined Surface Quality in Ultra-Precision Plane Honing

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Advances in Abrasive Technology V

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Periodical:

Key Engineering Materials (Volumes 238-239)

Pages:

137-142

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.238-239.137

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Online since:

April 2003

Authors:

Tsunemoto Kuriyagawa, K. Nishihara, Shinya Suzuki, Yin Biao Guo, Katsuo Syoji

Keywords:

Dynamic Pressure, Flatness, Optical Wave Guide, Plane Honing, Radial Wheel, Scratch, Spiral Wheel, Surface Roughness (SR), Ultra-Fine Grit Diamond Wheel, Wafer

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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Citation:

[1] K.Konayashi: J. of Soc. of Grinding Engineers, Vol. 41, No. 3 (1997), p.82 (in Japanese).

[2] K.Syoji: Tool Engineer, Vol. 36, No. 6 (1992), p.73 (in Japanese).

[3] Y.Matsushita et al.: Ultra-Precision Wafer Processing Technology (Science Forum, Japan 2000) p.141 (in Japanese).

[4] T.Kuriyagawa et al.: J. of Soc. of Grinding Engineers, Vol. 40, No. 4 (1996), p.203 (in Japanese). 0 0.01 0.02 0.03 0.04 0.05 0.06 Roughness Ra µm Min Max MaxMin Radial 3000 Spiral 3000 200rpm 400rpm Spiral 1500 Wheel speed ω1=ω2 Fig.8 Comparison of surface roughness of spiral and radial wheels 0 1 2 3 4 5 6 Flatness � m 400rpm 200rpm Wheel speed ω1=ω2 Spiral Radial Fig. 9 Comparison of flatness of spiral and radial wheels

DOI: 10.21090/ijaerd.60176