Development of an On-Machine Observation and Profile Measurement System with an AFM and its Properties

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Periodical:

Key Engineering Materials (Volumes 238-239)

Edited by:

Yongsheng Gao, Jun'ichi Tamaki and Koichi Kitajima

Pages:

153-156

Citation:

Y. Watanabe et al., "Development of an On-Machine Observation and Profile Measurement System with an AFM and its Properties", Key Engineering Materials, Vols. 238-239, pp. 153-156, 2003

Online since:

April 2003

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[1] S. Moriyasu, K. Katahira, W. Lin, Y. Yamagata and H. Ohmori: On-machine Surface Roughness Measurement with AFM, Proceeding of the 3rd International Conference and General meeting of the European Society for Precision Engineering and Nanotechnology, Vol. 2 (2002).

[2] S. Morita, H. Ohmori, Y. Yamagata, K. Katahira, Y. Uehara, and T. Higuchi: Ultraprecision Diamond Turning and On-machine Profile Measurement of 400 mm Double-sided Fresnel Lenses, Advances in Abrasive Technology, The Korean Association of Machining Engineers, (2001).

[3] K. Yoshizumi, K. Kubo, H. Takeuchi, K. Handa and T. Kasai: Ultrahigh Accurate 3-D Profilometer Using Atomic Force Probe Measure Nanometer, Journal of JSPE, Vol. 68 (2002), No. 3, pp.361-366.

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