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HomeKey Engineering MaterialsKey Engineering Materials Vols. 238-239Development of an On-Machine Observation and...

Development of an On-Machine Observation and Profile Measurement System with an AFM and its Properties

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Advances in Abrasive Technology V

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Periodical:

Key Engineering Materials (Volumes 238-239)

Pages:

153-156

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.238-239.153

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Online since:

April 2003

Authors:

Y. Watanabe, Sei Moriyasu, Kazutoshi Katahira, Wei Min Lin, Hitoshi Ohmori, Akitake Makinouchi, Hirofumi Tashiro

Keywords:

Atomic Force Microscope (AFM), On-Machine Measurement (OMM), Shape, Surface Roughness (SR), Ultra-Precision Machining

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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[1] S. Moriyasu, K. Katahira, W. Lin, Y. Yamagata and H. Ohmori: On-machine Surface Roughness Measurement with AFM, Proceeding of the 3rd International Conference and General meeting of the European Society for Precision Engineering and Nanotechnology, Vol. 2 (2002), pp.703-706.

[2] S. Morita, H. Ohmori, Y. Yamagata, K. Katahira, Y. Uehara, and T. Higuchi: Ultraprecision Diamond Turning and On-machine Profile Measurement of 400 mm Double-sided Fresnel Lenses, Advances in Abrasive Technology, The Korean Association of Machining Engineers, (2001), pp.35-38.

[3] K. Yoshizumi, K. Kubo, H. Takeuchi, K. Handa and T. Kasai: Ultrahigh Accurate 3-D Profilometer Using Atomic Force Probe Measure Nanometer, Journal of JSPE, Vol. 68 (2002), No. 3, pp.361-366.