Evaluation of Surfaces of Single SiC Crystal Polished with Various Kinds of Particles

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Periodical:

Key Engineering Materials (Volumes 238-239)

Edited by:

Yongsheng Gao, Jun'ichi Tamaki and Koichi Kitajima

Pages:

175-182

DOI:

10.4028/www.scientific.net/KEM.238-239.175

Citation:

J. Watanabe et al., "Evaluation of Surfaces of Single SiC Crystal Polished with Various Kinds of Particles", Key Engineering Materials, Vols. 238-239, pp. 175-182, 2003

Online since:

April 2003

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Price:

$35.00

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