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Effective Buffer Structures and Dielectric Properties of Epitaxial Pb(Mg_1/3Nb_2/3)O₃ Thin Films on Si Substrates

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Electroceramics in Japan VI

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Periodical:

Key Engineering Materials (Volume 248)

Pages:

65-68

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.248.65

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Online since:

August 2003

Authors:

Tomoaki Yamada, Naoki Wakiya, Kazuo Shinozaki, Nobuyasu Mizutani, Masao Kondo, Kazuaki Kurihara

Keywords:

Buffer Layer, Dielectric Property, Epitaxial Growth, PLD, PMN, Silicon

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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[1] N. Wakiya, K. Shinozaki and N. Mizutani, Thin Solid Films, 384 (2001) p.189.

[2] F. Sánchez, R. Aguiar, V. Trtik, C. Guerrero, C. Ferrater and M. Varela, J. Mater. Res., 13 (1998) p.1422.

[3] T. Yamada, N. Wakiya, K. Shinozaki and N. Mizutani, Jpn.J. Appl. Phys., 40 (2001) p.281.

[4] T. Yamada, T. Kiguchi, N. Wakiya, K. Shinozaki and N. Mizutani, 2002 MRS Fall Meeting proceedings (in press).

[5] D. O'Neill, G. Catalan, F. Porras, R.M. Bowman and J.M. Gregg, J. Mater. Sci. Mater. Electron., 9 (1998) p.199 e-mail: nmizutan@ceram. titech. ac. jp, Fax: +81-3-5734-3369, http: /www. sim. ceram. titech. ac. jp.