Effect of Source Supply Method on Microstructure Development in PZT Thin Films by Pulsed Metalorganic Chemical Vapor Deposition

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Edited by:

T. Kimura, T. Takenaka, S. Fujitsu and K. Shinozaki

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53-56

Citation:

N. Wakiya et al., "Effect of Source Supply Method on Microstructure Development in PZT Thin Films by Pulsed Metalorganic Chemical Vapor Deposition", Key Engineering Materials, Vol. 248, pp. 53-56, 2003

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August 2003

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