Effect of Starting Materials on Deposition Behavior, Crystal Structure and Electrical Properties of MOCVD-PZT Films

Abstract:

Article Preview

Info:

Periodical:

Edited by:

T. Kimura, T. Takenaka, S. Fujitsu and K. Shinozaki

Pages:

57-60

DOI:

10.4028/www.scientific.net/KEM.248.57

Citation:

T. Ozeki and H. Funakubo, "Effect of Starting Materials on Deposition Behavior, Crystal Structure and Electrical Properties of MOCVD-PZT Films ", Key Engineering Materials, Vol. 248, pp. 57-60, 2003

Online since:

August 2003

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.