Effect of Starting Materials on Deposition Behavior, Crystal Structure and Electrical Properties of MOCVD-PZT Films

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T. Kimura, T. Takenaka, S. Fujitsu and K. Shinozaki

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T. Ozeki and H. Funakubo, "Effect of Starting Materials on Deposition Behavior, Crystal Structure and Electrical Properties of MOCVD-PZT Films ", Key Engineering Materials, Vol. 248, pp. 57-60, 2003

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August 2003

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