Measurement and Analysis of AFM-Based Nano-Indentation on Micro-Machined Silicon Surface

Abstract:

Article Preview

Info:

Periodical:

Key Engineering Materials (Volumes 257-258)

Edited by:

Thomas Pearce, Yongsheng Gao, Jun'ichi Tamaki and Tsunemoto Kuriyagawa

Pages:

39-44

DOI:

10.4028/www.scientific.net/KEM.257-258.39

Citation:

Q. L. Zhao et al., "Measurement and Analysis of AFM-Based Nano-Indentation on Micro-Machined Silicon Surface", Key Engineering Materials, Vols. 257-258, pp. 39-44, 2004

Online since:

February 2004

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.