Measurement and Analysis of AFM-Based Nano-Indentation on Micro-Machined Silicon Surface

Qing Liang Zhao; Ming Jun Chen; Ying Chun Liang; Shen Dong; K. Cheng

doi:10.4028/www.scientific.net/KEM.257-258.39

Paper Titles

Brittle-Ductile Transition in Nano Bending of Monocrystalline Silicon Carbide Analyzed by Molecular Dynamics Simulation
p.15

Molecular Dynamics Analysis of Ultra High-Acceleration and Vibration Cutting
p.21

Abrasive Nanometric Machining: Modelling, Simulation and its Application Promise
p.27

A Study of the Molecular Dynamics Simulation in Nanometric Grinding
p.33

Measurement and Analysis of AFM-Based Nano-Indentation on Micro-Machined Silicon Surface
p.39

A Novel FEA Model for the Integral Analysis of a Machine Tool and Machining Processes
p.45

Influence of the Static Stiffness of Grinding System on the Generation of Affected Layers
p.51

Geometric Models of the Ultra-Precision Grinding for Large Non-Axisymmetric Optical Aspheric Surfaces
p.57

Energy Limitations in HEDG and Conventional Grinding
p.63

HomeKey Engineering MaterialsKey Engineering Materials Vols. 257-258Measurement and Analysis of AFM-Based...

Measurement and Analysis of AFM-Based Nano-Indentation on Micro-Machined Silicon Surface

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Periodical:

Key Engineering Materials (Volumes 257-258)

Pages:

39-44

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.257-258.39

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Online since:

February 2004

Authors:

Qing Liang Zhao, Ming Jun Chen, Ying Chun Liang, Shen Dong, K. Cheng

Keywords:

Atomic Force Microscope (AFM), Diamond Tip, Micro Machining, Nanoindentation, Silicon

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References

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