Measurement and Analysis of AFM-Based Nano-Indentation on Micro-Machined Silicon Surface

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Periodical:

Key Engineering Materials (Volumes 257-258)

Edited by:

Thomas Pearce, Yongsheng Gao, Jun'ichi Tamaki and Tsunemoto Kuriyagawa

Pages:

39-44

Citation:

Q. L. Zhao et al., "Measurement and Analysis of AFM-Based Nano-Indentation on Micro-Machined Silicon Surface", Key Engineering Materials, Vols. 257-258, pp. 39-44, 2004

Online since:

February 2004

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$38.00

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[3] M. Kempf, M. Goken and H. Vehoff: Applied Physics, Part A, Vol. A66 (1998), p. S843.

[4] C.J. Lu, D. Bogy and R. Kaneko: ASME - J. Tribol, Vol. 116 (1994), p.175.

[5] J.J. Vlassak and W.D. Nix: J. Mech. Phys. Solids, Vol. 42 (1994), p.1223.

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