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Finite Element Analysis of Nano/Micro Pit Array Fabrication by Nanoindentation Process

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Periodical:

Key Engineering Materials (Volumes 274-276)

Pages:

319-324

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.274-276.319

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Online since:

October 2004

Authors:

Chung Gil Kang, S.W. Youn, J.W. Lee

Keywords:

Amorphous Silicon, Elastic Recovery, Nanoindentation, Pile-Up, Pyrex 7740 Glass

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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