[1]
J. Y. Kim, L. K. Kwac, J. H. Han, H. W. Kim, A. Shimokobe: A Study on the Optimal Design using FEM for Micro Stage, KSPE, Vol. 19 No. 10 (2002), p.60~65.
Google Scholar
[2]
MARC Analysis Research Corporation manual, VOLUME A, VOLUME B, VOLUME C, VOLUME D, (1994).
Google Scholar
[3]
S.T. Smith and D.G. Chetwynd : Foundation of Ultra Precision Mechanism Design( Gordon and Breach Science Publishers, 1992).
Google Scholar
[4]
D. Keith Bowen: Development in Nanotechnology, (Gordon and Breach Science Publishers, 1992).
Google Scholar
[5]
H. Nakazawa: Principles of Precision Engineering, (Gordon and Breach Science Publishers, 1994).
Google Scholar
[6]
A. Simokohbe: Control performance of Lead screw Positioning with Intelligent Control Methods, JSPE Vol. 64. No. 11 (1998), p.1627~1632.
Google Scholar
[7]
Kaiji Sato: Performance Evaluation Lead screw Positioning System with Five Kinds of Control Methode(2nd Report), JSPE Vol. 63. No. 12 (1997), p.1759~1763.
Google Scholar
[8]
E. T. Falangas, J. A. Dcoorack and S. Koshigoe: Controlling Plate Vibration Using Piezoelectric Actuator, IEEE Control System Magazine, Vol. 14, No. 4 (1994), p.34~41.
Google Scholar