Enhanced Sensitivity of the Pirani Vacuum Gauge by the AC Driving Method

Abstract:

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We improved the sensitivity of existing commercial Pirani-vacuum gauges employing the AC method in the vacuum range above 1 Torr. The signals obtained through the use of the AC method yield information related to the specific heat and heat conductivity of gas. The output signal is obtained by two components: the oscillating temperature amplitude, and its phase. The amplitude increases with the decrease of pressure in the vacuum range from the atmosphere to about 1 Torr, which arises from the decrease of the heat capacity with the decrease of gas density. In contrast, the phase decreases monotonically as pressure decreases and the slop of a dΘ/d(log P) is large at higher than 1 Torr. This provides a good advantage for developing a new Pirani gauge with high sensitivity.

Info:

Periodical:

Key Engineering Materials (Volumes 277-279)

Edited by:

Kwang Hwa Chung, Yong Hyeon Shin, Sue-Nie Park, Hyun Sook Cho, Soon-Ae Yoo, Byung Joo Min, Hyo-Suk Lim and Kyung Hwa Yoo

Pages:

990-994

DOI:

10.4028/www.scientific.net/KEM.277-279.990

Citation:

D. J. Seong et al., "Enhanced Sensitivity of the Pirani Vacuum Gauge by the AC Driving Method", Key Engineering Materials, Vols. 277-279, pp. 990-994, 2005

Online since:

January 2005

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Price:

$35.00

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