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Enhanced Sensitivity of the Pirani Vacuum Gauge by the AC Driving Method

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Abstract:

We improved the sensitivity of existing commercial Pirani-vacuum gauges employing the AC method in the vacuum range above 1 Torr. The signals obtained through the use of the AC method yield information related to the specific heat and heat conductivity of gas. The output signal is obtained by two components: the oscillating temperature amplitude, and its phase. The amplitude increases with the decrease of pressure in the vacuum range from the atmosphere to about 1 Torr, which arises from the decrease of the heat capacity with the decrease of gas density. In contrast, the phase decreases monotonically as pressure decreases and the slop of a dΘ/d(log P) is large at higher than 1 Torr. This provides a good advantage for developing a new Pirani gauge with high sensitivity.

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Info:

Periodical:

Key Engineering Materials (Volumes 277-279)

Pages:

990-994

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.277-279.990

Citation:

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Online since:

January 2005

Authors:

Dae Jin Seong, Yong Hyeon Shin, Kwang Hwa Chung, D.H. Kim, Je Sik Shin, Y.J. Yun

Keywords:

3ω Method, AC Deriving Method, Lock-In Amplifier, Sensitivity, Sensitivity of Pirani Vacuum Gauge, Specific Heat of Gas, Thermal Conductivity of Gas

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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