An Ultra-Precision Air-Pin Sensor and Its Dynamic Characteristics

Abstract:

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The non-contact pneumatic measurement technique is useful for dimension measurement. The authors have developed a new type of air-pin pneumatic-electronic sensor. The ultra-precision air-pin sensor and the dynamic characteristics of the sensor are investigated. The measurement accuracy of the air-pin pneumatic-electronic sensor is better than 0.1µm for the 10µm measurement range. The response time is less then 10ms.

Info:

Periodical:

Key Engineering Materials (Volumes 295-296)

Edited by:

Yongsheng Gao, Shuetfung Tse and Wei Gao

Pages:

557-562

DOI:

10.4028/www.scientific.net/KEM.295-296.557

Citation:

H. Zhang et al., "An Ultra-Precision Air-Pin Sensor and Its Dynamic Characteristics", Key Engineering Materials, Vols. 295-296, pp. 557-562, 2005

Online since:

October 2005

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Price:

$35.00

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