An Ultra-Precision Air-Pin Sensor and Its Dynamic Characteristics
The non-contact pneumatic measurement technique is useful for dimension measurement. The authors have developed a new type of air-pin pneumatic-electronic sensor. The ultra-precision air-pin sensor and the dynamic characteristics of the sensor are investigated. The measurement accuracy of the air-pin pneumatic-electronic sensor is better than 0.1µm for the 10µm measurement range. The response time is less then 10ms.
Yongsheng Gao, Shuetfung Tse and Wei Gao
H. Zhang et al., "An Ultra-Precision Air-Pin Sensor and Its Dynamic Characteristics", Key Engineering Materials, Vols. 295-296, pp. 557-562, 2005