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An Ultra-Precision Air-Pin Sensor and Its Dynamic Characteristics
Abstract:
The non-contact pneumatic measurement technique is useful for dimension measurement. The authors have developed a new type of air-pin pneumatic-electronic sensor. The ultra-precision air-pin sensor and the dynamic characteristics of the sensor are investigated. The measurement accuracy of the air-pin pneumatic-electronic sensor is better than 0.1µm for the 10µm measurement range. The response time is less then 10ms.
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557-562
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Online since:
October 2005
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© 2005 Trans Tech Publications Ltd. All Rights Reserved
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