An Ultra-Precision Air-Pin Sensor and Its Dynamic Characteristics

Article Preview

Abstract:

The non-contact pneumatic measurement technique is useful for dimension measurement. The authors have developed a new type of air-pin pneumatic-electronic sensor. The ultra-precision air-pin sensor and the dynamic characteristics of the sensor are investigated. The measurement accuracy of the air-pin pneumatic-electronic sensor is better than 0.1µm for the 10µm measurement range. The response time is less then 10ms.

You might also be interested in these eBooks

Info:

Periodical:

Key Engineering Materials (Volumes 295-296)

Pages:

557-562

Citation:

Online since:

October 2005

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2005 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

[1] Y.C. Liu: The Pneumatic Gauge (Mechanical Industry Press, 1990).

Google Scholar

[2] S. Deng and H. Zhang: Proceedings of 5th International Symposium on Manufacturing Technology, Jinan, China, 1999, p.198.

Google Scholar

[3] S. Deng, H. Nie and H. Zhang and Q. Zhao: Proceedings of Symposium on Nano-metrology in Precision Engineering, Hong Kong, 1998, p.228.

Google Scholar

[4] S. Deng, Q. Zhao and H. Zhang: IMEKO 2000 Proceedings, Vienna, Austria, Vol. II (2001), p.185.

Google Scholar

[5] J. Sun and S. Deng: Chinese Journal of Scientific Instrument, Vol. 17 (1996), p.95.

Google Scholar