Mechanical Properties of Photosensitive Polyimide Film by Nanoindentation and Microtensile Test

Abstract:

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A free-standing photosensitive polyimide film with thickness of 10µm is fabricated with the different curing temperatures using a micro fabrication process. The microtensile specimens of a strip type are made to facilitate a tensile testing. The Young’s modulus and yield strength of photosensitive polyimide film are measured with various strain rates from 10-4 /s to 10-3 /s by using a microtensile test. Also, the hardness and Young’s modulus of polyimide films are obtained from nanoindentation test. Finally, the mechanical properties measured from microtensile test are compared with those from nanoindentation test.

Info:

Periodical:

Key Engineering Materials (Volumes 297-300)

Edited by:

Young-Jin Kim, Dong-Ho Bae and Yun-Jae Kim

Pages:

237-243

DOI:

10.4028/www.scientific.net/KEM.297-300.237

Citation:

S. Hur et al., "Mechanical Properties of Photosensitive Polyimide Film by Nanoindentation and Microtensile Test ", Key Engineering Materials, Vols. 297-300, pp. 237-243, 2005

Online since:

November 2005

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Price:

$35.00

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